Image measurement of micromachined device's dimension and shape

Jinjun Deng; Weizheng Yuan; Xiaoying Li; Binghe Ma

doi:10.3901/jme.2002.supp.101

Image measurement of micromachined device's dimension and shape

Jinjun Deng, Weizheng Yuan, Xiaoying Li, Binghe Ma

Northwestern Polytechnical University Xian

科研成果: 期刊稿件 › 文章 › 同行评审

4 引用（Scopus）

摘要

A non-contacting and harmless image measurement system is presented. According to the measurement characteristic of micromachined device's dimension, a system is set up by use of plane CCD as image sensor. The measurement principle and the algorithm of typical plane geometric dimension are also discussed. The experimental results show that the system is steady and precise.

源语言	英语
页（从-至）	101-103+107
期刊	Jixie Gongcheng Xuebao/Journal of Mechanical Engineering
卷	38
期	SUPPL.
DOI	https://doi.org/10.3901/jme.2002.supp.101
出版状态	已出版 - 12月 2002

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@article{8b7efed23818496f9b58a671539169c0,

title = "Image measurement of micromachined device's dimension and shape",

abstract = "A non-contacting and harmless image measurement system is presented. According to the measurement characteristic of micromachined device's dimension, a system is set up by use of plane CCD as image sensor. The measurement principle and the algorithm of typical plane geometric dimension are also discussed. The experimental results show that the system is steady and precise.",

keywords = "Geometric dimension, Image measurement, Micro-machined devices",

author = "Jinjun Deng and Weizheng Yuan and Xiaoying Li and Binghe Ma",

year = "2002",

month = dec,

doi = "10.3901/jme.2002.supp.101",

language = "英语",

volume = "38",

pages = "101--103+107",

journal = "Jixie Gongcheng Xuebao/Journal of Mechanical Engineering",

issn = "0577-6686",

publisher = "Editorial Office of Chinese Journal of Mechanical Engineering",

number = "SUPPL.",

}

TY - JOUR

T1 - Image measurement of micromachined device's dimension and shape

AU - Deng, Jinjun

AU - Yuan, Weizheng

AU - Li, Xiaoying

AU - Ma, Binghe

PY - 2002/12

Y1 - 2002/12

N2 - A non-contacting and harmless image measurement system is presented. According to the measurement characteristic of micromachined device's dimension, a system is set up by use of plane CCD as image sensor. The measurement principle and the algorithm of typical plane geometric dimension are also discussed. The experimental results show that the system is steady and precise.

AB - A non-contacting and harmless image measurement system is presented. According to the measurement characteristic of micromachined device's dimension, a system is set up by use of plane CCD as image sensor. The measurement principle and the algorithm of typical plane geometric dimension are also discussed. The experimental results show that the system is steady and precise.

KW - Geometric dimension

KW - Image measurement

KW - Micro-machined devices

UR - http://www.scopus.com/inward/record.url?scp=0141708083&partnerID=8YFLogxK

U2 - 10.3901/jme.2002.supp.101

DO - 10.3901/jme.2002.supp.101

M3 - 文章

AN - SCOPUS:0141708083

SN - 0577-6686

VL - 38

SP - 101-103+107

JO - Jixie Gongcheng Xuebao/Journal of Mechanical Engineering

JF - Jixie Gongcheng Xuebao/Journal of Mechanical Engineering

IS - SUPPL.

ER -

Image measurement of micromachined device's dimension and shape

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