Image measurement of micromachined device's dimension and shape

Jinjun Deng; Weizheng Yuan; Xiaoying Li; Binghe Ma

doi:10.3901/jme.2002.supp.101

Image measurement of micromachined device's dimension and shape

Jinjun Deng, Weizheng Yuan, Xiaoying Li, Binghe Ma

Northwestern Polytechnical University Xian

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

A non-contacting and harmless image measurement system is presented. According to the measurement characteristic of micromachined device's dimension, a system is set up by use of plane CCD as image sensor. The measurement principle and the algorithm of typical plane geometric dimension are also discussed. The experimental results show that the system is steady and precise.

Original language	English
Pages (from-to)	101-103+107
Journal	Jixie Gongcheng Xuebao/Journal of Mechanical Engineering
Volume	38
Issue number	SUPPL.
DOIs	https://doi.org/10.3901/jme.2002.supp.101
State	Published - Dec 2002

Keywords

Geometric dimension
Image measurement
Micro-machined devices

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10.3901/jme.2002.supp.101

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@article{8b7efed23818496f9b58a671539169c0,

title = "Image measurement of micromachined device's dimension and shape",

abstract = "A non-contacting and harmless image measurement system is presented. According to the measurement characteristic of micromachined device's dimension, a system is set up by use of plane CCD as image sensor. The measurement principle and the algorithm of typical plane geometric dimension are also discussed. The experimental results show that the system is steady and precise.",

keywords = "Geometric dimension, Image measurement, Micro-machined devices",

author = "Jinjun Deng and Weizheng Yuan and Xiaoying Li and Binghe Ma",

year = "2002",

month = dec,

doi = "10.3901/jme.2002.supp.101",

language = "英语",

volume = "38",

pages = "101--103+107",

journal = "Jixie Gongcheng Xuebao/Journal of Mechanical Engineering",

issn = "0577-6686",

publisher = "Editorial Office of Chinese Journal of Mechanical Engineering",

number = "SUPPL.",

}

TY - JOUR

T1 - Image measurement of micromachined device's dimension and shape

AU - Deng, Jinjun

AU - Yuan, Weizheng

AU - Li, Xiaoying

AU - Ma, Binghe

PY - 2002/12

Y1 - 2002/12

N2 - A non-contacting and harmless image measurement system is presented. According to the measurement characteristic of micromachined device's dimension, a system is set up by use of plane CCD as image sensor. The measurement principle and the algorithm of typical plane geometric dimension are also discussed. The experimental results show that the system is steady and precise.

AB - A non-contacting and harmless image measurement system is presented. According to the measurement characteristic of micromachined device's dimension, a system is set up by use of plane CCD as image sensor. The measurement principle and the algorithm of typical plane geometric dimension are also discussed. The experimental results show that the system is steady and precise.

KW - Geometric dimension

KW - Image measurement

KW - Micro-machined devices

UR - http://www.scopus.com/inward/record.url?scp=0141708083&partnerID=8YFLogxK

U2 - 10.3901/jme.2002.supp.101

DO - 10.3901/jme.2002.supp.101

M3 - 文章

AN - SCOPUS:0141708083

SN - 0577-6686

VL - 38

SP - 101-103+107

JO - Jixie Gongcheng Xuebao/Journal of Mechanical Engineering

JF - Jixie Gongcheng Xuebao/Journal of Mechanical Engineering

IS - SUPPL.

ER -

Image measurement of micromachined device's dimension and shape

Abstract

Keywords

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