High temperature thin film thermocouples on different ceramic substrates

Xinhang Jin; Binghe Ma; Jinjun Deng; Chengyu Ma

doi:10.1109/NEMS.2015.7147406

High temperature thin film thermocouples on different ceramic substrates

Xinhang Jin, Binghe Ma, Jinjun Deng, Chengyu Ma

微电子学院

Northwestern Polytechnical University Xian

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

5 引用（Scopus）

摘要

This paper was directed at the effect of ceramic substrate on NiCr/NiSi film thermocouples fabricated on two ceramics substrate. One was on smooth Al₂O₃ substrate. The other was on silicon carbide ceramic reinforced by carbon fiber (CFCC-SiC). Since the CFCC-SiC has rough surface, the stress between the layer was greater and the thin film was easier to crack. With experiments the measure temperature of the thin film thermocouples on both of them could reach 700°C. Calibrate test data showed that the high-temperature stability of the thin film thermocouple on smooth Al₂O₃ substrate was much better than the other.

源语言	英语
主期刊名	2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015
出版商	Institute of Electrical and Electronics Engineers Inc.
页	183-186
页数	4
ISBN（电子版）	9781467366953
DOI	https://doi.org/10.1109/NEMS.2015.7147406
出版状态	已出版 - 1 7月 2015
活动	10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015 - Xi'an, 中国期限: 7 4月 2015 → 11 4月 2015

出版系列

姓名	2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015

会议

会议	10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015
国家/地区	中国
市	Xi'an
时期	7/04/15 → 11/04/15

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10.1109/NEMS.2015.7147406

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链接到 Scopus 的出版物

引用此

Jin, X., Ma, B., Deng, J., & Ma, C. (2015). High temperature thin film thermocouples on different ceramic substrates. 在 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015 (页码 183-186). 文章 7147406 (2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NEMS.2015.7147406

Jin, Xinhang ; Ma, Binghe ; Deng, Jinjun 等. / High temperature thin film thermocouples on different ceramic substrates. 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015. Institute of Electrical and Electronics Engineers Inc., 2015. 页码 183-186 (2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015).

@inproceedings{8e486e5aeb0843bc8e78951cc051a9a4,

title = "High temperature thin film thermocouples on different ceramic substrates",

abstract = "This paper was directed at the effect of ceramic substrate on NiCr/NiSi film thermocouples fabricated on two ceramics substrate. One was on smooth Al2O3 substrate. The other was on silicon carbide ceramic reinforced by carbon fiber (CFCC-SiC). Since the CFCC-SiC has rough surface, the stress between the layer was greater and the thin film was easier to crack. With experiments the measure temperature of the thin film thermocouples on both of them could reach 700°C. Calibrate test data showed that the high-temperature stability of the thin film thermocouple on smooth Al2O3 substrate was much better than the other.",

author = "Xinhang Jin and Binghe Ma and Jinjun Deng and Chengyu Ma",

note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015 ; Conference date: 07-04-2015 Through 11-04-2015",

year = "2015",

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doi = "10.1109/NEMS.2015.7147406",

language = "英语",

series = "2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015",

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booktitle = "2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015",

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Jin, X, Ma, B, Deng, J & Ma, C 2015, High temperature thin film thermocouples on different ceramic substrates. 在 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015., 7147406, 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015, Institute of Electrical and Electronics Engineers Inc., 页码 183-186, 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015, Xi'an, 中国, 7/04/15. https://doi.org/10.1109/NEMS.2015.7147406

High temperature thin film thermocouples on different ceramic substrates. / Jin, Xinhang; Ma, Binghe; Deng, Jinjun 等.
2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015. Institute of Electrical and Electronics Engineers Inc., 2015. 页码 183-186 7147406 (2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015).

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

TY - GEN

T1 - High temperature thin film thermocouples on different ceramic substrates

AU - Jin, Xinhang

AU - Ma, Binghe

AU - Deng, Jinjun

AU - Ma, Chengyu

PY - 2015/7/1

Y1 - 2015/7/1

N2 - This paper was directed at the effect of ceramic substrate on NiCr/NiSi film thermocouples fabricated on two ceramics substrate. One was on smooth Al2O3 substrate. The other was on silicon carbide ceramic reinforced by carbon fiber (CFCC-SiC). Since the CFCC-SiC has rough surface, the stress between the layer was greater and the thin film was easier to crack. With experiments the measure temperature of the thin film thermocouples on both of them could reach 700°C. Calibrate test data showed that the high-temperature stability of the thin film thermocouple on smooth Al2O3 substrate was much better than the other.

AB - This paper was directed at the effect of ceramic substrate on NiCr/NiSi film thermocouples fabricated on two ceramics substrate. One was on smooth Al2O3 substrate. The other was on silicon carbide ceramic reinforced by carbon fiber (CFCC-SiC). Since the CFCC-SiC has rough surface, the stress between the layer was greater and the thin film was easier to crack. With experiments the measure temperature of the thin film thermocouples on both of them could reach 700°C. Calibrate test data showed that the high-temperature stability of the thin film thermocouple on smooth Al2O3 substrate was much better than the other.

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U2 - 10.1109/NEMS.2015.7147406

DO - 10.1109/NEMS.2015.7147406

M3 - 会议稿件

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T3 - 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015

SP - 183

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BT - 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015

Y2 - 7 April 2015 through 11 April 2015

ER -

Jin X, Ma B, Deng J, Ma C. High temperature thin film thermocouples on different ceramic substrates. 在 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015. Institute of Electrical and Electronics Engineers Inc. 2015. 页码 183-186. 7147406. (2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015). doi: 10.1109/NEMS.2015.7147406

High temperature thin film thermocouples on different ceramic substrates

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