High temperature thin film thermocouples on different ceramic substrates

Xinhang Jin; Binghe Ma; Jinjun Deng; Chengyu Ma

doi:10.1109/NEMS.2015.7147406

High temperature thin film thermocouples on different ceramic substrates

Xinhang Jin, Binghe Ma, Jinjun Deng, Chengyu Ma

School of Microelectronics

Northwestern Polytechnical University Xian

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

5 Scopus citations

Abstract

This paper was directed at the effect of ceramic substrate on NiCr/NiSi film thermocouples fabricated on two ceramics substrate. One was on smooth Al₂O₃ substrate. The other was on silicon carbide ceramic reinforced by carbon fiber (CFCC-SiC). Since the CFCC-SiC has rough surface, the stress between the layer was greater and the thin film was easier to crack. With experiments the measure temperature of the thin film thermocouples on both of them could reach 700°C. Calibrate test data showed that the high-temperature stability of the thin film thermocouple on smooth Al₂O₃ substrate was much better than the other.

Original language	English
Title of host publication	2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	183-186
Number of pages	4
ISBN (Electronic)	9781467366953
DOIs	https://doi.org/10.1109/NEMS.2015.7147406
State	Published - 1 Jul 2015
Event	10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015 - Xi'an, China Duration: 7 Apr 2015 → 11 Apr 2015

Publication series

Name	2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015

Conference

Conference	10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015
Country/Territory	China
City	Xi'an
Period	7/04/15 → 11/04/15

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10.1109/NEMS.2015.7147406

Cite this

Jin, X., Ma, B., Deng, J., & Ma, C. (2015). High temperature thin film thermocouples on different ceramic substrates. In 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015 (pp. 183-186). Article 7147406 (2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NEMS.2015.7147406

Jin, Xinhang ; Ma, Binghe ; Deng, Jinjun et al. / High temperature thin film thermocouples on different ceramic substrates. 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 183-186 (2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015).

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title = "High temperature thin film thermocouples on different ceramic substrates",

abstract = "This paper was directed at the effect of ceramic substrate on NiCr/NiSi film thermocouples fabricated on two ceramics substrate. One was on smooth Al2O3 substrate. The other was on silicon carbide ceramic reinforced by carbon fiber (CFCC-SiC). Since the CFCC-SiC has rough surface, the stress between the layer was greater and the thin film was easier to crack. With experiments the measure temperature of the thin film thermocouples on both of them could reach 700°C. Calibrate test data showed that the high-temperature stability of the thin film thermocouple on smooth Al2O3 substrate was much better than the other.",

author = "Xinhang Jin and Binghe Ma and Jinjun Deng and Chengyu Ma",

note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015 ; Conference date: 07-04-2015 Through 11-04-2015",

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doi = "10.1109/NEMS.2015.7147406",

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series = "2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015",

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Jin, X, Ma, B, Deng, J & Ma, C 2015, High temperature thin film thermocouples on different ceramic substrates. in 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015., 7147406, 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015, Institute of Electrical and Electronics Engineers Inc., pp. 183-186, 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015, Xi'an, China, 7/04/15. https://doi.org/10.1109/NEMS.2015.7147406

High temperature thin film thermocouples on different ceramic substrates. / Jin, Xinhang; Ma, Binghe; Deng, Jinjun et al.
2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015. Institute of Electrical and Electronics Engineers Inc., 2015. p. 183-186 7147406 (2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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Y1 - 2015/7/1

N2 - This paper was directed at the effect of ceramic substrate on NiCr/NiSi film thermocouples fabricated on two ceramics substrate. One was on smooth Al2O3 substrate. The other was on silicon carbide ceramic reinforced by carbon fiber (CFCC-SiC). Since the CFCC-SiC has rough surface, the stress between the layer was greater and the thin film was easier to crack. With experiments the measure temperature of the thin film thermocouples on both of them could reach 700°C. Calibrate test data showed that the high-temperature stability of the thin film thermocouple on smooth Al2O3 substrate was much better than the other.

AB - This paper was directed at the effect of ceramic substrate on NiCr/NiSi film thermocouples fabricated on two ceramics substrate. One was on smooth Al2O3 substrate. The other was on silicon carbide ceramic reinforced by carbon fiber (CFCC-SiC). Since the CFCC-SiC has rough surface, the stress between the layer was greater and the thin film was easier to crack. With experiments the measure temperature of the thin film thermocouples on both of them could reach 700°C. Calibrate test data showed that the high-temperature stability of the thin film thermocouple on smooth Al2O3 substrate was much better than the other.

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PB - Institute of Electrical and Electronics Engineers Inc.

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Jin X, Ma B, Deng J, Ma C. High temperature thin film thermocouples on different ceramic substrates. In 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015. Institute of Electrical and Electronics Engineers Inc. 2015. p. 183-186. 7147406. (2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015). doi: 10.1109/NEMS.2015.7147406

High temperature thin film thermocouples on different ceramic substrates

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