High Quality Factor Surface Acoustic Wave Temperature Sensor with Impedance Adjustment

Kai Cheng, Guangyao Pei, Yunzhe Liu, Jianing Zhang, Chuqiao Wang, Xingxu Zhang, Binghe Ma, Jian Luo

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

High quality factor and impedance-matched surface acoustic wave sensors play a crucial role in temperature measurements in harsh environments such as aircraft engines. The quality factor affects the measurement accuracy of SAW sensors, whereas impedance influences the transmission efficiency of the sensor. This paper presents a SAW temperature sensor with an enhanced quality factor through the precise control of composite film electrode thickness to achieve impedance matching. Compared to conventional sensors, the impedance-optimized SAW temperature sensor exhibits a significantly improved Q factor, increasing from 6915 to 25363, and a matching impedance of 51 Ω and -16°. The error of the SAW temperature sensor ranging from 70 to 1000°C is less than 1%, ensuring reliable performance under extreme conditions.

源语言英语
主期刊名2024 IEEE Sensors, SENSORS 2024 - Conference Proceedings
出版商Institute of Electrical and Electronics Engineers Inc.
ISBN(电子版)9798350363517
DOI
出版状态已出版 - 2024
活动2024 IEEE Sensors, SENSORS 2024 - Kobe, 日本
期限: 20 10月 202423 10月 2024

出版系列

姓名Proceedings of IEEE Sensors
ISSN(印刷版)1930-0395
ISSN(电子版)2168-9229

会议

会议2024 IEEE Sensors, SENSORS 2024
国家/地区日本
Kobe
时期20/10/2423/10/24

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