@inproceedings{4d519d9f197e45d380ba87e869f8c5d3,
title = "High Quality Factor Surface Acoustic Wave Temperature Sensor with Impedance Adjustment",
abstract = "High quality factor and impedance-matched surface acoustic wave sensors play a crucial role in temperature measurements in harsh environments such as aircraft engines. The quality factor affects the measurement accuracy of SAW sensors, whereas impedance influences the transmission efficiency of the sensor. This paper presents a SAW temperature sensor with an enhanced quality factor through the precise control of composite film electrode thickness to achieve impedance matching. Compared to conventional sensors, the impedance-optimized SAW temperature sensor exhibits a significantly improved Q factor, increasing from 6915 to 25363, and a matching impedance of 51 Ω and -16°. The error of the SAW temperature sensor ranging from 70 to 1000°C is less than 1%, ensuring reliable performance under extreme conditions.",
keywords = "high quality factor, impedance matching, surface acoustic wave, temperature sensing",
author = "Kai Cheng and Guangyao Pei and Yunzhe Liu and Jianing Zhang and Chuqiao Wang and Xingxu Zhang and Binghe Ma and Jian Luo",
note = "Publisher Copyright: {\textcopyright} 2024 IEEE.; 2024 IEEE Sensors, SENSORS 2024 ; Conference date: 20-10-2024 Through 23-10-2024",
year = "2024",
doi = "10.1109/SENSORS60989.2024.10784999",
language = "英语",
series = "Proceedings of IEEE Sensors",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2024 IEEE Sensors, SENSORS 2024 - Conference Proceedings",
}