High Available Carbon Nanotube Film Micro-Device with Controllable Temperature Coefficient of Resistance

Wei Gao, Baoyun Sun, Yu Zhang, Binghe Ma, Jian Luo, Jinjun Deng, Weizheng Yuan

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

This paper presents a multi-role single-walled carbon nanotube (SWCNT) film micro-device with the controllable temperature coefficient of resistance (TCR). The SWCNT film is prepared on flexible or silicon substrates by dielectrophoresis (DEP) technique. Modified vacuum thermal annealing is carried out to adjust the chip with the positive, negative and near-zero TCR ranging from -15768ppm/K to 9934ppm/K for different applications. Demonstrations in a thermostatic water bath and micro-wind tunnel confirm that the proposed device has a broad application field, such as a temperature sensor, flow sensor and heater etc.

源语言英语
主期刊名33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
出版商Institute of Electrical and Electronics Engineers Inc.
806-809
页数4
ISBN(电子版)9781728135809
DOI
出版状态已出版 - 1月 2020
活动33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 - Vancouver, 加拿大
期限: 18 1月 202022 1月 2020

出版系列

姓名Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2020-January
ISSN(印刷版)1084-6999

会议

会议33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
国家/地区加拿大
Vancouver
时期18/01/2022/01/20

指纹

探究 'High Available Carbon Nanotube Film Micro-Device with Controllable Temperature Coefficient of Resistance' 的科研主题。它们共同构成独一无二的指纹。

引用此