@inproceedings{64a48e728e8249d4a51d064a2d0c064c,
title = "High Available Carbon Nanotube Film Micro-Device with Controllable Temperature Coefficient of Resistance",
abstract = "This paper presents a multi-role single-walled carbon nanotube (SWCNT) film micro-device with the controllable temperature coefficient of resistance (TCR). The SWCNT film is prepared on flexible or silicon substrates by dielectrophoresis (DEP) technique. Modified vacuum thermal annealing is carried out to adjust the chip with the positive, negative and near-zero TCR ranging from -15768ppm/K to 9934ppm/K for different applications. Demonstrations in a thermostatic water bath and micro-wind tunnel confirm that the proposed device has a broad application field, such as a temperature sensor, flow sensor and heater etc.",
keywords = "Carbon nanotube, micro-device, modified vacuum annealing, temperature coefficient of resistance, thermal sensor",
author = "Wei Gao and Baoyun Sun and Yu Zhang and Binghe Ma and Jian Luo and Jinjun Deng and Weizheng Yuan",
note = "Publisher Copyright: {\textcopyright} 2020 IEEE.; 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 ; Conference date: 18-01-2020 Through 22-01-2020",
year = "2020",
month = jan,
doi = "10.1109/MEMS46641.2020.9056286",
language = "英语",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "806--809",
booktitle = "33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020",
}