TY - JOUR
T1 - Front-surface fabrication of moderate aspect ratio micro-channels in fused silica by single picosecond Gaussian–Bessel laser pulse
AU - Liu, Xin
AU - Sanner, Nicolas
AU - Sentis, Marc
AU - Stoian, Razvan
AU - Zhao, Wei
AU - Cheng, Guanghua
AU - Utéza, Olivier
N1 - Publisher Copyright:
© 2018, The Author(s).
PY - 2018/2/1
Y1 - 2018/2/1
N2 - Single-shot Gaussian–Bessel laser beams of 1 ps pulse duration and of ~ 0.9 μm core size and ~ 60 μm depth of focus are used for drilling micro-channels on front side of fused silica in ambient condition. Channels ablated at different pulse energies are fully characterized by AFM and post-processing polishing procedures. We identify experimental energy conditions (typically 1.5 µJ) suitable to fabricate non-tapered channels with mean diameter of ~ 1.2 µm and length of ~ 40 μm while maintaining an utmost quality of the front opening of the channels. In addition, by further applying accurate post-polishing procedure, channels with high surface quality and moderate aspect ratio down to a few units are accessible, which would find interest in the surface micro-structuring of materials, with perspective of further scalability to meta-material specifications.
AB - Single-shot Gaussian–Bessel laser beams of 1 ps pulse duration and of ~ 0.9 μm core size and ~ 60 μm depth of focus are used for drilling micro-channels on front side of fused silica in ambient condition. Channels ablated at different pulse energies are fully characterized by AFM and post-processing polishing procedures. We identify experimental energy conditions (typically 1.5 µJ) suitable to fabricate non-tapered channels with mean diameter of ~ 1.2 µm and length of ~ 40 μm while maintaining an utmost quality of the front opening of the channels. In addition, by further applying accurate post-polishing procedure, channels with high surface quality and moderate aspect ratio down to a few units are accessible, which would find interest in the surface micro-structuring of materials, with perspective of further scalability to meta-material specifications.
UR - http://www.scopus.com/inward/record.url?scp=85041445931&partnerID=8YFLogxK
U2 - 10.1007/s00339-018-1634-1
DO - 10.1007/s00339-018-1634-1
M3 - 文章
AN - SCOPUS:85041445931
SN - 0947-8396
VL - 124
JO - Applied Physics A: Materials Science and Processing
JF - Applied Physics A: Materials Science and Processing
IS - 2
M1 - 206
ER -