Front-surface fabrication of moderate aspect ratio micro-channels in fused silica by single picosecond Gaussian–Bessel laser pulse

Xin Liu, Nicolas Sanner, Marc Sentis, Razvan Stoian, Wei Zhao, Guanghua Cheng, Olivier Utéza

Research output: Contribution to journalArticlepeer-review

11 Scopus citations

Abstract

Single-shot Gaussian–Bessel laser beams of 1 ps pulse duration and of ~ 0.9 μm core size and ~ 60 μm depth of focus are used for drilling micro-channels on front side of fused silica in ambient condition. Channels ablated at different pulse energies are fully characterized by AFM and post-processing polishing procedures. We identify experimental energy conditions (typically 1.5 µJ) suitable to fabricate non-tapered channels with mean diameter of ~ 1.2 µm and length of ~ 40 μm while maintaining an utmost quality of the front opening of the channels. In addition, by further applying accurate post-polishing procedure, channels with high surface quality and moderate aspect ratio down to a few units are accessible, which would find interest in the surface micro-structuring of materials, with perspective of further scalability to meta-material specifications.

Original languageEnglish
Article number206
JournalApplied Physics A: Materials Science and Processing
Volume124
Issue number2
DOIs
StatePublished - 1 Feb 2018
Externally publishedYes

Fingerprint

Dive into the research topics of 'Front-surface fabrication of moderate aspect ratio micro-channels in fused silica by single picosecond Gaussian–Bessel laser pulse'. Together they form a unique fingerprint.

Cite this