@inproceedings{d4d8e0adf1ee49d4982f82dc24815a74,
title = "Effects of bias on optical and chemical bonding properties of germanium carbon films",
abstract = "Amorphous hydrogenated Ge1-xCx films are prepared by radio frequency (RF) magnetron cosputtering using Ge/graphite composite target and their composition, optical and chemical bonding properties as a function of bias have been investigated. The results show a decrease in the deposition rate with increasing bias, and the optical gap nearly keep constant due to effects of both composition and chemical bonding. Through the analysis of X-ray photoelectron spectroscopy, we find that the content of Ge-C bonds first increases and then decreases as increasing bias while the Ge-O bond decreases monotonically.",
keywords = "Chemical bonding, Cosputtering, Germanium carbon, Optical property",
author = "Che, {Xing Sen} and Liu, {Zheng Tang}",
year = "2014",
doi = "10.4028/www.scientific.net/AMR.881-883.1074",
language = "英语",
isbn = "9783037859940",
series = "Advanced Materials Research",
pages = "1074--1078",
booktitle = "Chemical, Material and Metallurgical Engineering III",
note = "2013 3rd International Conference on Chemical, Metallurgical Engineering, ICCMME 2013 ; Conference date: 10-12-2013 Through 11-12-2013",
}