Effects of bias on optical and chemical bonding properties of germanium carbon films

Xing Sen Che, Zheng Tang Liu

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

Amorphous hydrogenated Ge1-xCx films are prepared by radio frequency (RF) magnetron cosputtering using Ge/graphite composite target and their composition, optical and chemical bonding properties as a function of bias have been investigated. The results show a decrease in the deposition rate with increasing bias, and the optical gap nearly keep constant due to effects of both composition and chemical bonding. Through the analysis of X-ray photoelectron spectroscopy, we find that the content of Ge-C bonds first increases and then decreases as increasing bias while the Ge-O bond decreases monotonically.

Original languageEnglish
Title of host publicationChemical, Material and Metallurgical Engineering III
Pages1074-1078
Number of pages5
DOIs
StatePublished - 2014
Event2013 3rd International Conference on Chemical, Metallurgical Engineering, ICCMME 2013 - Zhuhai, China
Duration: 10 Dec 201311 Dec 2013

Publication series

NameAdvanced Materials Research
Volume881-883
ISSN (Print)1022-6680

Conference

Conference2013 3rd International Conference on Chemical, Metallurgical Engineering, ICCMME 2013
Country/TerritoryChina
CityZhuhai
Period10/12/1311/12/13

Keywords

  • Chemical bonding
  • Cosputtering
  • Germanium carbon
  • Optical property

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