Effect of chemical vapor deposition of Si3N4, BN and B4C coatings on the mechanical and dielectric properties of porous Si3N4 ceramic

Xiangming Li; Litong Zhang; Xiaowei Yin

doi:10.1016/j.scriptamat.2011.09.037

Effect of chemical vapor deposition of Si₃N₄, BN and B₄C coatings on the mechanical and dielectric properties of porous Si₃N₄ ceramic

Xiangming Li, Litong Zhang, Xiaowei Yin

材料学院

Northwest Agriculture and Forestry University

科研成果: 期刊稿件 › 文章 › 同行评审

30 引用（Scopus）

摘要

The mechanical properties of porous Si₃N₄ ceramic are noticeably improved after chemical vapor deposition (CVD) of Si ₃N₄, BN and B₄C coatings. The dielectric constant and loss of porous Si₃N₄ ceramic remain almost unchanged after CVD of BN, increase slightly after CVD of Si₃N ₄, but increase greatly after CVD of B₄C. Overall, CVD of Si₃N₄ performs better than CVD of BN and B₄C in improving the mechanical properties and keeping the low dielectric constant and loss of porous Si₃N₄ ceramic.

源语言	英语
页（从-至）	33-36
页数	4
期刊	Scripta Materialia
卷	66
期	1
DOI	https://doi.org/10.1016/j.scriptamat.2011.09.037
出版状态	已出版 - 1月 2012

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title = "Effect of chemical vapor deposition of Si3N4, BN and B4C coatings on the mechanical and dielectric properties of porous Si3N4 ceramic",

abstract = "The mechanical properties of porous Si3N4 ceramic are noticeably improved after chemical vapor deposition (CVD) of Si 3N4, BN and B4C coatings. The dielectric constant and loss of porous Si3N4 ceramic remain almost unchanged after CVD of BN, increase slightly after CVD of Si3N 4, but increase greatly after CVD of B4C. Overall, CVD of Si3N4 performs better than CVD of BN and B4C in improving the mechanical properties and keeping the low dielectric constant and loss of porous Si3N4 ceramic.",

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author = "Xiangming Li and Litong Zhang and Xiaowei Yin",

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AU - Li, Xiangming

AU - Zhang, Litong

AU - Yin, Xiaowei

PY - 2012/1

Y1 - 2012/1

N2 - The mechanical properties of porous Si3N4 ceramic are noticeably improved after chemical vapor deposition (CVD) of Si 3N4, BN and B4C coatings. The dielectric constant and loss of porous Si3N4 ceramic remain almost unchanged after CVD of BN, increase slightly after CVD of Si3N 4, but increase greatly after CVD of B4C. Overall, CVD of Si3N4 performs better than CVD of BN and B4C in improving the mechanical properties and keeping the low dielectric constant and loss of porous Si3N4 ceramic.

AB - The mechanical properties of porous Si3N4 ceramic are noticeably improved after chemical vapor deposition (CVD) of Si 3N4, BN and B4C coatings. The dielectric constant and loss of porous Si3N4 ceramic remain almost unchanged after CVD of BN, increase slightly after CVD of Si3N 4, but increase greatly after CVD of B4C. Overall, CVD of Si3N4 performs better than CVD of BN and B4C in improving the mechanical properties and keeping the low dielectric constant and loss of porous Si3N4 ceramic.

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KW - BN

KW - Dielectric properties

KW - Mechanical properties

KW - SiN

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JO - Scripta Materialia

JF - Scripta Materialia

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Effect of chemical vapor deposition of Si3N4, BN and B4C coatings on the mechanical and dielectric properties of porous Si3N4 ceramic

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Effect of chemical vapor deposition of Si₃N₄, BN and B₄C coatings on the mechanical and dielectric properties of porous Si₃N₄ ceramic