Effect of chemical vapor deposition of Si3N4, BN and B4C coatings on the mechanical and dielectric properties of porous Si3N4 ceramic

Xiangming Li; Litong Zhang; Xiaowei Yin

doi:10.1016/j.scriptamat.2011.09.037

Effect of chemical vapor deposition of Si₃N₄, BN and B₄C coatings on the mechanical and dielectric properties of porous Si₃N₄ ceramic

Xiangming Li, Litong Zhang, Xiaowei Yin

School of Materials Sience and Engineering

Northwest Agriculture and Forestry University

Research output: Contribution to journal › Article › peer-review

30 Scopus citations

Abstract

The mechanical properties of porous Si₃N₄ ceramic are noticeably improved after chemical vapor deposition (CVD) of Si ₃N₄, BN and B₄C coatings. The dielectric constant and loss of porous Si₃N₄ ceramic remain almost unchanged after CVD of BN, increase slightly after CVD of Si₃N ₄, but increase greatly after CVD of B₄C. Overall, CVD of Si₃N₄ performs better than CVD of BN and B₄C in improving the mechanical properties and keeping the low dielectric constant and loss of porous Si₃N₄ ceramic.

Original language	English
Pages (from-to)	33-36
Number of pages	4
Journal	Scripta Materialia
Volume	66
Issue number	1
DOIs	https://doi.org/10.1016/j.scriptamat.2011.09.037
State	Published - Jan 2012

Keywords

BC
BN
Dielectric properties
Mechanical properties
SiN

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10.1016/j.scriptamat.2011.09.037

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title = "Effect of chemical vapor deposition of Si3N4, BN and B4C coatings on the mechanical and dielectric properties of porous Si3N4 ceramic",

abstract = "The mechanical properties of porous Si3N4 ceramic are noticeably improved after chemical vapor deposition (CVD) of Si 3N4, BN and B4C coatings. The dielectric constant and loss of porous Si3N4 ceramic remain almost unchanged after CVD of BN, increase slightly after CVD of Si3N 4, but increase greatly after CVD of B4C. Overall, CVD of Si3N4 performs better than CVD of BN and B4C in improving the mechanical properties and keeping the low dielectric constant and loss of porous Si3N4 ceramic.",

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author = "Xiangming Li and Litong Zhang and Xiaowei Yin",

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T1 - Effect of chemical vapor deposition of Si3N4, BN and B4C coatings on the mechanical and dielectric properties of porous Si3N4 ceramic

AU - Li, Xiangming

AU - Zhang, Litong

AU - Yin, Xiaowei

PY - 2012/1

Y1 - 2012/1

N2 - The mechanical properties of porous Si3N4 ceramic are noticeably improved after chemical vapor deposition (CVD) of Si 3N4, BN and B4C coatings. The dielectric constant and loss of porous Si3N4 ceramic remain almost unchanged after CVD of BN, increase slightly after CVD of Si3N 4, but increase greatly after CVD of B4C. Overall, CVD of Si3N4 performs better than CVD of BN and B4C in improving the mechanical properties and keeping the low dielectric constant and loss of porous Si3N4 ceramic.

AB - The mechanical properties of porous Si3N4 ceramic are noticeably improved after chemical vapor deposition (CVD) of Si 3N4, BN and B4C coatings. The dielectric constant and loss of porous Si3N4 ceramic remain almost unchanged after CVD of BN, increase slightly after CVD of Si3N 4, but increase greatly after CVD of B4C. Overall, CVD of Si3N4 performs better than CVD of BN and B4C in improving the mechanical properties and keeping the low dielectric constant and loss of porous Si3N4 ceramic.

KW - BC

KW - BN

KW - Dielectric properties

KW - Mechanical properties

KW - SiN

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U2 - 10.1016/j.scriptamat.2011.09.037

DO - 10.1016/j.scriptamat.2011.09.037

M3 - 文章

AN - SCOPUS:80755172110

SN - 1359-6462

VL - 66

SP - 33

EP - 36

JO - Scripta Materialia

JF - Scripta Materialia

IS - 1

ER -

Effect of chemical vapor deposition of Si₃N₄, BN and B₄C coatings on the mechanical and dielectric properties of porous Si₃N₄ ceramic

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Keywords

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