TY - GEN
T1 - Chemical vapor deposition of boron-doped carbon coating from BCl 3-C3H6-H2-Ar gas mixture
AU - Liu, Yongsheng
AU - Wan, Jia Jia
AU - Zhang, Litong
AU - Cheng, Laifei
PY - 2014
Y1 - 2014
N2 - Boron-doped carbon coating was deposited from BCl3-C 3H6-H2-Ar gas mixture by low pressure chemical vapor deposition. The morphologies, compositions and bonding states of deposits were analyzed using scanning electron microscope and X-ray photoelectron spectroscopy. The effects of deposition temperature, C/B ratio in reactants and Ar dilution flow on deposition rate, morphologies, compositions and bonding states were widely discussed. The deposition rate was mainly influenced by deposition temperature and C/B ratio in reactants. The cross-section morphologies changed from glass-like to nano-laminated structure with increasing temperature, C/B ratio and Ar dilution flow. The boron concentrations decreased with increasing temperature. C/B ratio and Ar dilution flow, corresponding with increased carbon concentrations.
AB - Boron-doped carbon coating was deposited from BCl3-C 3H6-H2-Ar gas mixture by low pressure chemical vapor deposition. The morphologies, compositions and bonding states of deposits were analyzed using scanning electron microscope and X-ray photoelectron spectroscopy. The effects of deposition temperature, C/B ratio in reactants and Ar dilution flow on deposition rate, morphologies, compositions and bonding states were widely discussed. The deposition rate was mainly influenced by deposition temperature and C/B ratio in reactants. The cross-section morphologies changed from glass-like to nano-laminated structure with increasing temperature, C/B ratio and Ar dilution flow. The boron concentrations decreased with increasing temperature. C/B ratio and Ar dilution flow, corresponding with increased carbon concentrations.
UR - http://www.scopus.com/inward/record.url?scp=84904015114&partnerID=8YFLogxK
U2 - 10.1002/9781118932995.ch38
DO - 10.1002/9781118932995.ch38
M3 - 会议稿件
AN - SCOPUS:84904015114
SN - 9781118932988
T3 - Ceramic Transactions
SP - 357
EP - 370
BT - High Temperature Ceramic Matrix Composites 8 - A Collection of Papers Presented at the HTCMC 2013 Conference
PB - American Ceramic Society
T2 - 8th High Temperature Ceramic Matrix Composites Conference, HTCMC 2013
Y2 - 22 September 2013 through 26 September 2013
ER -