TY - GEN
T1 - Analysis and characterization of amorphous boron carbide coatings deposited from BCl3-CH4-H2 mixtures
AU - Liu, Yongsheng
AU - Chai, Nan
AU - Zhang, Litong
AU - Cheng, Laifei
PY - 2014
Y1 - 2014
N2 - Amorphous boron carbide was prepared by chemical vapor deposition from BCl3-CH4-H2 system. The deposits were characterized by SEM, EDS, XRD, FTIR, Raman, and XPS. The results showed that deposition indicate cauliflower-like surface and glass-like cross-sectional morphologies. The boron concentration is 42.83at%, corresponding with 56.32at% carbon and 0.75at% oxygen by EDS. The XRD was not suitable to characterize amorphous boron carbide. B-C bond state was demonstrated by Raman, FTIR and XPS spectrum. Amorphous structure was demonstrated by TEM. The formation of intermediate reactant, BxCyHzCl was very important for the deposition of amorphous boron carbide.
AB - Amorphous boron carbide was prepared by chemical vapor deposition from BCl3-CH4-H2 system. The deposits were characterized by SEM, EDS, XRD, FTIR, Raman, and XPS. The results showed that deposition indicate cauliflower-like surface and glass-like cross-sectional morphologies. The boron concentration is 42.83at%, corresponding with 56.32at% carbon and 0.75at% oxygen by EDS. The XRD was not suitable to characterize amorphous boron carbide. B-C bond state was demonstrated by Raman, FTIR and XPS spectrum. Amorphous structure was demonstrated by TEM. The formation of intermediate reactant, BxCyHzCl was very important for the deposition of amorphous boron carbide.
UR - http://www.scopus.com/inward/record.url?scp=84903998768&partnerID=8YFLogxK
M3 - 会议稿件
AN - SCOPUS:84903998768
SN - 9781118932988
T3 - Ceramic Transactions
SP - 345
EP - 355
BT - High Temperature Ceramic Matrix Composites 8 - A Collection of Papers Presented at the HTCMC 2013 Conference
PB - American Ceramic Society
T2 - 8th High Temperature Ceramic Matrix Composites Conference, HTCMC 2013
Y2 - 22 September 2013 through 26 September 2013
ER -