Analysis and characterization of amorphous boron carbide coatings deposited from BCl3-CH4-H2 mixtures

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Abstract

Amorphous boron carbide was prepared by chemical vapor deposition from BCl3-CH4-H2 system. The deposits were characterized by SEM, EDS, XRD, FTIR, Raman, and XPS. The results showed that deposition indicate cauliflower-like surface and glass-like cross-sectional morphologies. The boron concentration is 42.83at%, corresponding with 56.32at% carbon and 0.75at% oxygen by EDS. The XRD was not suitable to characterize amorphous boron carbide. B-C bond state was demonstrated by Raman, FTIR and XPS spectrum. Amorphous structure was demonstrated by TEM. The formation of intermediate reactant, BxCyHzCl was very important for the deposition of amorphous boron carbide.

Original languageEnglish
Title of host publicationHigh Temperature Ceramic Matrix Composites 8 - A Collection of Papers Presented at the HTCMC 2013 Conference
PublisherAmerican Ceramic Society
Pages345-355
Number of pages11
ISBN (Print)9781118932988
StatePublished - 2014
Event8th High Temperature Ceramic Matrix Composites Conference, HTCMC 2013 - Xi'an, Shaanxi, China
Duration: 22 Sep 201326 Sep 2013

Publication series

NameCeramic Transactions
Volume248
ISSN (Print)1042-1122

Conference

Conference8th High Temperature Ceramic Matrix Composites Conference, HTCMC 2013
Country/TerritoryChina
CityXi'an, Shaanxi
Period22/09/1326/09/13

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