TY - JOUR
T1 - A Zeolitic Imidazolate Framework-8-Coated Coupled Resonant Gas Sensor
AU - Wang, Chenxi
AU - Wang, Chen
AU - Xia, Benzheng
AU - Zhang, Hemin
AU - Matavz, Aleksander
AU - Wang, Yuan
AU - Quan, Aojie
AU - Wang, Linlin
AU - Arnauts, Giel
AU - Tu, Min
AU - Ameloot, Rob
AU - Kraft, Michael
N1 - Publisher Copyright:
© 1992-2012 IEEE.
PY - 2023/8/1
Y1 - 2023/8/1
N2 - In this work, a zeolitic imidazolate framework-8 (ZIF-8)-coated coupled resonant sensor was fabricated using a solvent-free method. The solvent-free method avoids the use of solvents for ZIF-8 synthesis, which eliminates the risk of device contamination, corrosion, or destruction. This process enables batch fabrication of ZIF-8-coated coupled resonators at wafer level. By tracking shifts in frequency and amplitude ratio, the sensor demonstrates strong responses to ethanol vapor of different concentrations and exhibits good reversible detection ability. The normalized sensitivity using amplitude ratio shift as an output metric is 6.06× 10 ^ -3 at low ethanol vapor concentrations (2%-7.5%), which is nearly six times that using frequency shift ( 1.06× 10 ^ -3 ). For higher ethanol vapor concentrations (10%-60%), the normalized sensitivity using amplitude ratio shift is 2.66× 10 ^ -3 , almost 40 times that using frequency shift ( 6.73× 10 ^ -5 ). Given the significantly enhanced sensitivity, the ZIF-8-coated coupled resonant sensor shows promising potential for ultra-sensitive gas sensing.
AB - In this work, a zeolitic imidazolate framework-8 (ZIF-8)-coated coupled resonant sensor was fabricated using a solvent-free method. The solvent-free method avoids the use of solvents for ZIF-8 synthesis, which eliminates the risk of device contamination, corrosion, or destruction. This process enables batch fabrication of ZIF-8-coated coupled resonators at wafer level. By tracking shifts in frequency and amplitude ratio, the sensor demonstrates strong responses to ethanol vapor of different concentrations and exhibits good reversible detection ability. The normalized sensitivity using amplitude ratio shift as an output metric is 6.06× 10 ^ -3 at low ethanol vapor concentrations (2%-7.5%), which is nearly six times that using frequency shift ( 1.06× 10 ^ -3 ). For higher ethanol vapor concentrations (10%-60%), the normalized sensitivity using amplitude ratio shift is 2.66× 10 ^ -3 , almost 40 times that using frequency shift ( 6.73× 10 ^ -5 ). Given the significantly enhanced sensitivity, the ZIF-8-coated coupled resonant sensor shows promising potential for ultra-sensitive gas sensing.
KW - coupled resonant sensor
KW - enhanced sensitivity
KW - gas sensing
KW - reversible detection
KW - ZIF-8
UR - http://www.scopus.com/inward/record.url?scp=85159847941&partnerID=8YFLogxK
U2 - 10.1109/JMEMS.2023.3272210
DO - 10.1109/JMEMS.2023.3272210
M3 - 文章
AN - SCOPUS:85159847941
SN - 1057-7157
VL - 32
SP - 371
EP - 380
JO - Journal of Microelectromechanical Systems
JF - Journal of Microelectromechanical Systems
IS - 4
ER -