A Zeolitic Imidazolate Framework-8-Coated Coupled Resonant Gas Sensor

Chenxi Wang, Chen Wang, Benzheng Xia, Hemin Zhang, Aleksander Matavz, Yuan Wang, Aojie Quan, Linlin Wang, Giel Arnauts, Min Tu, Rob Ameloot, Michael Kraft

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Abstract

In this work, a zeolitic imidazolate framework-8 (ZIF-8)-coated coupled resonant sensor was fabricated using a solvent-free method. The solvent-free method avoids the use of solvents for ZIF-8 synthesis, which eliminates the risk of device contamination, corrosion, or destruction. This process enables batch fabrication of ZIF-8-coated coupled resonators at wafer level. By tracking shifts in frequency and amplitude ratio, the sensor demonstrates strong responses to ethanol vapor of different concentrations and exhibits good reversible detection ability. The normalized sensitivity using amplitude ratio shift as an output metric is 6.06× 10 ^ -3 at low ethanol vapor concentrations (2%-7.5%), which is nearly six times that using frequency shift ( 1.06× 10 ^ -3 ). For higher ethanol vapor concentrations (10%-60%), the normalized sensitivity using amplitude ratio shift is 2.66× 10 ^ -3 , almost 40 times that using frequency shift ( 6.73× 10 ^ -5 ). Given the significantly enhanced sensitivity, the ZIF-8-coated coupled resonant sensor shows promising potential for ultra-sensitive gas sensing.

Original languageEnglish
Pages (from-to)371-380
Number of pages10
JournalJournal of Microelectromechanical Systems
Volume32
Issue number4
DOIs
StatePublished - 1 Aug 2023
Externally publishedYes

Keywords

  • coupled resonant sensor
  • enhanced sensitivity
  • gas sensing
  • reversible detection
  • ZIF-8

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