@inproceedings{222942341818481088b20577d747cd39,
title = "A Silicon MEMS Disk Resonator Oscillator Demonstrating 36 ppt Frequency Stability",
abstract = "This paper reports experimental results demonstrating excellent short-term frequency stability of 45.6 LHz (36 ppt@0.4 s integration time) for a bulk acoustic wave (BAW) silicon disk resonator oscillator. The n=4 radial mode of a BAW disk resonator demonstrates an extremely high-quality factor of 1.8*106 at 1.25 MHz. The disk is designed with anchors aligned with nodal locations to minimize anchor damping. The results on the measured short-term frequency stability reported here benchmark favourably relative to the state-of-the-art.",
keywords = "bulk mode resonators, frequency stability, MEMS oscillators",
author = "Madan Parajuli and Guillermo Sobreviela and Hemin Zhang and Seshia, {Ashwin A.}",
note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 ; Conference date: 20-06-2021 Through 25-06-2021",
year = "2021",
month = jun,
day = "20",
doi = "10.1109/Transducers50396.2021.9495722",
language = "英语",
series = "21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "305--308",
booktitle = "21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021",
}