A Silicon MEMS Disk Resonator Oscillator Demonstrating 36 ppt Frequency Stability

Madan Parajuli, Guillermo Sobreviela, Hemin Zhang, Ashwin A. Seshia

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

This paper reports experimental results demonstrating excellent short-term frequency stability of 45.6 LHz (36 ppt@0.4 s integration time) for a bulk acoustic wave (BAW) silicon disk resonator oscillator. The n=4 radial mode of a BAW disk resonator demonstrates an extremely high-quality factor of 1.8*106 at 1.25 MHz. The disk is designed with anchors aligned with nodal locations to minimize anchor damping. The results on the measured short-term frequency stability reported here benchmark favourably relative to the state-of-the-art.

Original languageEnglish
Title of host publication21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages305-308
Number of pages4
ISBN (Electronic)9781665412674
DOIs
StatePublished - 20 Jun 2021
Externally publishedYes
Event21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 - Virtual, Online, United States
Duration: 20 Jun 202125 Jun 2021

Publication series

Name21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

Conference

Conference21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
Country/TerritoryUnited States
CityVirtual, Online
Period20/06/2125/06/21

Keywords

  • bulk mode resonators
  • frequency stability
  • MEMS oscillators

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