摘要
This paper studies the effect of multiple geometric parameters of a micronozzle on a MEMS solid propellant thruster (MSPT) and establishes a quantitative optimisation model. Influences of the structural parameters of the micronozzle on performance are accurately calculated. The significance and contribution ratio of each parameter are evaluated by F distribution. Correspondingly, a horizontal MSPT is fabricated and tested to prove the optimisation model. In the implementation, a complete microigniter is formed by a single layer of Au, achieving an ultra-low ignition voltage of 2.1 V with an extremely low ignition resistance of 4 Ω.
源语言 | 英语 |
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页(从-至) | 847-859 |
页数 | 13 |
期刊 | Microsystem Technologies |
卷 | 22 |
期 | 4 |
DOI | |
出版状态 | 已出版 - 1 4月 2016 |