Abstract
This paper studies the effect of multiple geometric parameters of a micronozzle on a MEMS solid propellant thruster (MSPT) and establishes a quantitative optimisation model. Influences of the structural parameters of the micronozzle on performance are accurately calculated. The significance and contribution ratio of each parameter are evaluated by F distribution. Correspondingly, a horizontal MSPT is fabricated and tested to prove the optimisation model. In the implementation, a complete microigniter is formed by a single layer of Au, achieving an ultra-low ignition voltage of 2.1 V with an extremely low ignition resistance of 4 Ω.
Original language | English |
---|---|
Pages (from-to) | 847-859 |
Number of pages | 13 |
Journal | Microsystem Technologies |
Volume | 22 |
Issue number | 4 |
DOIs | |
State | Published - 1 Apr 2016 |