A Gas Sensor Based on Zif-8-Coated Coupled Resonators with Enhanced Sensitivity and Reversible Detection Ability

Chenxi Wang, Chen Wang, Benzheng Xia, Hemin Zhang, Aleksander Matavz, Yuan Wang, Aojie Quan, Min Tu, Linlin Wang, Michel D. Cooman, Rob Ameloot, Michael Kraft

科研成果: 书/报告/会议事项章节会议稿件同行评审

2 引用 (Scopus)

摘要

This paper develops a gas sensor with zeolitic imidazolate framework-8 (ZIF-8) coated coupled resonators. The porous ZIF-8 structure coats only one of the two coupled resonators and can adsorb specific gas molecules, resulting in mass differences between the two resonators. This mass change can be measured by either monitoring frequency shift or amplitude ratio variation. The gas sensing performance of the fabricated ZIF-8-coated coupled resonators was tested with ethanol vapour of different concentration levels. The sensitivity using amplitude ratios as output was 0.013/(P/P0) for lower ethanol vapour concentrations (1%-10%), which is one order of magnitude higher than that with conventional frequency shift as the output. For higher ethanol vapour concentrations (20%-80%), the sensitivity was 0.0022/(P/Po), which is twice than that with frequency shift as output. Additionally, it was shown that the reported gas sensor could be used for repeatable detection due to the reversible physisorption of ZIF-8 to ethanol vapour.

源语言英语
主期刊名35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
出版商Institute of Electrical and Electronics Engineers Inc.
724-727
页数4
ISBN(电子版)9781665409117
DOI
出版状态已出版 - 2022
已对外发布
活动35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 - Tokyo, 日本
期限: 9 1月 202213 1月 2022

出版系列

姓名Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2022-January
ISSN(印刷版)1084-6999

会议

会议35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
国家/地区日本
Tokyo
时期9/01/2213/01/22

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