A Gas Sensor Based on Zif-8-Coated Coupled Resonators with Enhanced Sensitivity and Reversible Detection Ability

Chenxi Wang; Chen Wang; Benzheng Xia; Hemin Zhang; Aleksander Matavz; Yuan Wang; Aojie Quan; Min Tu; Linlin Wang; Michel D. Cooman; Rob Ameloot; Michael Kraft

doi:10.1109/MEMS51670.2022.9699464

A Gas Sensor Based on Zif-8-Coated Coupled Resonators with Enhanced Sensitivity and Reversible Detection Ability

Chenxi Wang, Chen Wang, Benzheng Xia, Hemin Zhang, Aleksander Matavz, Yuan Wang, Aojie Quan, Min Tu, Linlin Wang, Michel D. Cooman, Rob Ameloot, Michael Kraft

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Scopus citations

Abstract

This paper develops a gas sensor with zeolitic imidazolate framework-8 (ZIF-8) coated coupled resonators. The porous ZIF-8 structure coats only one of the two coupled resonators and can adsorb specific gas molecules, resulting in mass differences between the two resonators. This mass change can be measured by either monitoring frequency shift or amplitude ratio variation. The gas sensing performance of the fabricated ZIF-8-coated coupled resonators was tested with ethanol vapour of different concentration levels. The sensitivity using amplitude ratios as output was 0.013/(P/P0) for lower ethanol vapour concentrations (1%-10%), which is one order of magnitude higher than that with conventional frequency shift as the output. For higher ethanol vapour concentrations (20%-80%), the sensitivity was 0.0022/(P/Po), which is twice than that with frequency shift as output. Additionally, it was shown that the reported gas sensor could be used for repeatable detection due to the reversible physisorption of ZIF-8 to ethanol vapour.

Original language	English
Title of host publication	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	724-727
Number of pages	4
ISBN (Electronic)	9781665409117
DOIs	https://doi.org/10.1109/MEMS51670.2022.9699464
State	Published - 2022
Externally published	Yes
Event	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 - Tokyo, Japan Duration: 9 Jan 2022 → 13 Jan 2022

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2022-January
ISSN (Print)	1084-6999

Conference

Conference	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Country/Territory	Japan
City	Tokyo
Period	9/01/22 → 13/01/22

Keywords

Coupled Resonators
Ethanol Vapour
Mode Localization
Zeolitic Imidazolate Framework-8 (ZIF-8) Gas sensor

Access to Document

10.1109/MEMS51670.2022.9699464

Cite this

Wang, C., Wang, C., Xia, B., Zhang, H., Matavz, A., Wang, Y., Quan, A., Tu, M., Wang, L., Cooman, M. D., Ameloot, R., & Kraft, M. (2022). A Gas Sensor Based on Zif-8-Coated Coupled Resonators with Enhanced Sensitivity and Reversible Detection Ability. In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 (pp. 724-727). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2022-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMS51670.2022.9699464

Wang, Chenxi ; Wang, Chen ; Xia, Benzheng et al. / A Gas Sensor Based on Zif-8-Coated Coupled Resonators with Enhanced Sensitivity and Reversible Detection Ability. 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. Institute of Electrical and Electronics Engineers Inc., 2022. pp. 724-727 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{cf5137825f5b41cb9c37a6bd1185f324,

title = "A Gas Sensor Based on Zif-8-Coated Coupled Resonators with Enhanced Sensitivity and Reversible Detection Ability",

abstract = "This paper develops a gas sensor with zeolitic imidazolate framework-8 (ZIF-8) coated coupled resonators. The porous ZIF-8 structure coats only one of the two coupled resonators and can adsorb specific gas molecules, resulting in mass differences between the two resonators. This mass change can be measured by either monitoring frequency shift or amplitude ratio variation. The gas sensing performance of the fabricated ZIF-8-coated coupled resonators was tested with ethanol vapour of different concentration levels. The sensitivity using amplitude ratios as output was 0.013/(P/P0) for lower ethanol vapour concentrations (1%-10%), which is one order of magnitude higher than that with conventional frequency shift as the output. For higher ethanol vapour concentrations (20%-80%), the sensitivity was 0.0022/(P/Po), which is twice than that with frequency shift as output. Additionally, it was shown that the reported gas sensor could be used for repeatable detection due to the reversible physisorption of ZIF-8 to ethanol vapour.",

keywords = "Coupled Resonators, Ethanol Vapour, Mode Localization, Zeolitic Imidazolate Framework-8 (ZIF-8) Gas sensor",

author = "Chenxi Wang and Chen Wang and Benzheng Xia and Hemin Zhang and Aleksander Matavz and Yuan Wang and Aojie Quan and Min Tu and Linlin Wang and Cooman, {Michel D.} and Rob Ameloot and Michael Kraft",

note = "Publisher Copyright: {\textcopyright} 2022 IEEE.; 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 ; Conference date: 09-01-2022 Through 13-01-2022",

year = "2022",

doi = "10.1109/MEMS51670.2022.9699464",

language = "英语",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "724--727",

booktitle = "35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022",

}

Wang, C, Wang, C, Xia, B, Zhang, H, Matavz, A, Wang, Y, Quan, A, Tu, M, Wang, L, Cooman, MD, Ameloot, R & Kraft, M 2022, A Gas Sensor Based on Zif-8-Coated Coupled Resonators with Enhanced Sensitivity and Reversible Detection Ability. in 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2022-January, Institute of Electrical and Electronics Engineers Inc., pp. 724-727, 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022, Tokyo, Japan, 9/01/22. https://doi.org/10.1109/MEMS51670.2022.9699464

A Gas Sensor Based on Zif-8-Coated Coupled Resonators with Enhanced Sensitivity and Reversible Detection Ability. / Wang, Chenxi; Wang, Chen; Xia, Benzheng et al.
35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. Institute of Electrical and Electronics Engineers Inc., 2022. p. 724-727 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2022-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A Gas Sensor Based on Zif-8-Coated Coupled Resonators with Enhanced Sensitivity and Reversible Detection Ability

AU - Wang, Chenxi

AU - Wang, Chen

AU - Xia, Benzheng

AU - Zhang, Hemin

AU - Matavz, Aleksander

AU - Wang, Yuan

AU - Quan, Aojie

AU - Tu, Min

AU - Wang, Linlin

AU - Cooman, Michel D.

AU - Ameloot, Rob

AU - Kraft, Michael

PY - 2022

Y1 - 2022

N2 - This paper develops a gas sensor with zeolitic imidazolate framework-8 (ZIF-8) coated coupled resonators. The porous ZIF-8 structure coats only one of the two coupled resonators and can adsorb specific gas molecules, resulting in mass differences between the two resonators. This mass change can be measured by either monitoring frequency shift or amplitude ratio variation. The gas sensing performance of the fabricated ZIF-8-coated coupled resonators was tested with ethanol vapour of different concentration levels. The sensitivity using amplitude ratios as output was 0.013/(P/P0) for lower ethanol vapour concentrations (1%-10%), which is one order of magnitude higher than that with conventional frequency shift as the output. For higher ethanol vapour concentrations (20%-80%), the sensitivity was 0.0022/(P/Po), which is twice than that with frequency shift as output. Additionally, it was shown that the reported gas sensor could be used for repeatable detection due to the reversible physisorption of ZIF-8 to ethanol vapour.

AB - This paper develops a gas sensor with zeolitic imidazolate framework-8 (ZIF-8) coated coupled resonators. The porous ZIF-8 structure coats only one of the two coupled resonators and can adsorb specific gas molecules, resulting in mass differences between the two resonators. This mass change can be measured by either monitoring frequency shift or amplitude ratio variation. The gas sensing performance of the fabricated ZIF-8-coated coupled resonators was tested with ethanol vapour of different concentration levels. The sensitivity using amplitude ratios as output was 0.013/(P/P0) for lower ethanol vapour concentrations (1%-10%), which is one order of magnitude higher than that with conventional frequency shift as the output. For higher ethanol vapour concentrations (20%-80%), the sensitivity was 0.0022/(P/Po), which is twice than that with frequency shift as output. Additionally, it was shown that the reported gas sensor could be used for repeatable detection due to the reversible physisorption of ZIF-8 to ethanol vapour.

KW - Coupled Resonators

KW - Ethanol Vapour

KW - Mode Localization

KW - Zeolitic Imidazolate Framework-8 (ZIF-8) Gas sensor

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DO - 10.1109/MEMS51670.2022.9699464

M3 - 会议稿件

AN - SCOPUS:85126390685

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 724

EP - 727

BT - 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022

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ER -

Wang C, Wang C, Xia B, Zhang H, Matavz A, Wang Y et al. A Gas Sensor Based on Zif-8-Coated Coupled Resonators with Enhanced Sensitivity and Reversible Detection Ability. In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. Institute of Electrical and Electronics Engineers Inc. 2022. p. 724-727. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMS51670.2022.9699464

A Gas Sensor Based on Zif-8-Coated Coupled Resonators with Enhanced Sensitivity and Reversible Detection Ability

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Keywords

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