摘要
A fast and efficient method is proposed in this letter to characterize the dielectric permittivity of thin-film materials. The measuring system is based on a TE103 rectangular split-cavity resonator operating at around 10 GHz, which has the advantage of providing nondestructive measurements while maintaining a high level of accuracy. The thin-film materials under test can be directly inserted in the split without being processed in a specific shape. Different dielectric materials are tested using this method. And the theoretical derivations and experimental measurements have been performed to confirm the validity and effectiveness of this approach.
源语言 | 英语 |
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页(从-至) | 75-80 |
页数 | 6 |
期刊 | Microwave and Optical Technology Letters |
卷 | 65 |
期 | 1 |
DOI | |
出版状态 | 已出版 - 1月 2023 |