摘要
A fast and efficient method is proposed in this letter to characterize the dielectric permittivity of thin-film materials. The measuring system is based on a TE103 rectangular split-cavity resonator operating at around 10 GHz, which has the advantage of providing nondestructive measurements while maintaining a high level of accuracy. The thin-film materials under test can be directly inserted in the split without being processed in a specific shape. Different dielectric materials are tested using this method. And the theoretical derivations and experimental measurements have been performed to confirm the validity and effectiveness of this approach.
| 源语言 | 英语 |
|---|---|
| 页（从-至） | 75-80 |
| 页数 | 6 |
| 期刊 | Microwave and Optical Technology Letters |
| 卷 | 65 |
| 期 | 1 |
| DOI | |
| 出版状态 | 已出版 - 1月 2023 |