A fast and efficient method for permittivity measurement of thin-film material

Tiancheng Qiu; Kangkang Han; Gao Wei; Siyuan Lei

doi:10.1002/mop.33457

A fast and efficient method for permittivity measurement of thin-film material

Tiancheng Qiu, Kangkang Han, Gao Wei, Siyuan Lei

School of Electronics and Information

Northwestern Polytechnical University Xian

Research output: Contribution to journal › Article › peer-review

Abstract

A fast and efficient method is proposed in this letter to characterize the dielectric permittivity of thin-film materials. The measuring system is based on a TE₁₀₃ rectangular split-cavity resonator operating at around 10 GHz, which has the advantage of providing nondestructive measurements while maintaining a high level of accuracy. The thin-film materials under test can be directly inserted in the split without being processed in a specific shape. Different dielectric materials are tested using this method. And the theoretical derivations and experimental measurements have been performed to confirm the validity and effectiveness of this approach.

Original language	English
Pages (from-to)	75-80
Number of pages	6
Journal	Microwave and Optical Technology Letters
Volume	65
Issue number	1
DOIs	https://doi.org/10.1002/mop.33457
State	Published - Jan 2023

Keywords

non-destructive
permittivity
split-cavity

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10.1002/mop.33457

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abstract = "A fast and efficient method is proposed in this letter to characterize the dielectric permittivity of thin-film materials. The measuring system is based on a TE103 rectangular split-cavity resonator operating at around 10 GHz, which has the advantage of providing nondestructive measurements while maintaining a high level of accuracy. The thin-film materials under test can be directly inserted in the split without being processed in a specific shape. Different dielectric materials are tested using this method. And the theoretical derivations and experimental measurements have been performed to confirm the validity and effectiveness of this approach.",

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AU - Qiu, Tiancheng

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AU - Wei, Gao

AU - Lei, Siyuan

PY - 2023/1

Y1 - 2023/1

N2 - A fast and efficient method is proposed in this letter to characterize the dielectric permittivity of thin-film materials. The measuring system is based on a TE103 rectangular split-cavity resonator operating at around 10 GHz, which has the advantage of providing nondestructive measurements while maintaining a high level of accuracy. The thin-film materials under test can be directly inserted in the split without being processed in a specific shape. Different dielectric materials are tested using this method. And the theoretical derivations and experimental measurements have been performed to confirm the validity and effectiveness of this approach.

AB - A fast and efficient method is proposed in this letter to characterize the dielectric permittivity of thin-film materials. The measuring system is based on a TE103 rectangular split-cavity resonator operating at around 10 GHz, which has the advantage of providing nondestructive measurements while maintaining a high level of accuracy. The thin-film materials under test can be directly inserted in the split without being processed in a specific shape. Different dielectric materials are tested using this method. And the theoretical derivations and experimental measurements have been performed to confirm the validity and effectiveness of this approach.

KW - non-destructive

KW - permittivity

KW - split-cavity

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M3 - 文章

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EP - 80

JO - Microwave and Optical Technology Letters

JF - Microwave and Optical Technology Letters

IS - 1

ER -

A fast and efficient method for permittivity measurement of thin-film material

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Keywords

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