Wrinkled Microelectrode Interface Based on Oil-Pretreated Hyperelastic Substrate

Bowen Ji; Minghao Wang; Zhejun Guo; Wen Hong; Longchun Wang; Xiaolin Wang; Bin Yang; Wei Wang; Jingquan Liu

doi:10.1109/MEMSYS.2019.8870820

Wrinkled Microelectrode Interface Based on Oil-Pretreated Hyperelastic Substrate

Bowen Ji, Minghao Wang, Zhejun Guo, Wen Hong, Longchun Wang, Xiaolin Wang, Bin Yang, Wei Wang, Jingquan Liu

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Scopus citations

Abstract

This paper reports a unique fabrication method to obtain wrinkled microelectrodes with different surface morphologies based on different hyperelastic substrates for the first time. The wrinkle microstructures are enhanced by mixture silicone oil in the uncured poly (dimethyl siloxane) (PDMS) or Ecoflex polymer followed by oil-extraction in chloroform and depositing 5\ \mu \mathrm{m} Parylene-C film. The wrinkle amplitude of the oil-pretreated PDMS and Ecoflex with Parylene-C top layer show 5-fold and 125-fold increase than the unpretreated ones, respectively. Besides, the wrinkled 3D microelectrode surface distinctly exhibits greater electrochemical properties than the flat 2D one, with impedance decreases of 29.2% and 38.9% for the oil-pretreated PDMS and Ecoflex elastomer.

Original language	English
Title of host publication	2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	561-564
Number of pages	4
ISBN (Electronic)	9781728116105
DOIs	https://doi.org/10.1109/MEMSYS.2019.8870820
State	Published - Jan 2019
Externally published	Yes
Event	32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 - Seoul, Korea, Republic of Duration: 27 Jan 2019 → 31 Jan 2019

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2019-January
ISSN (Print)	1084-6999

Conference

Conference	32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019
Country/Territory	Korea, Republic of
City	Seoul
Period	27/01/19 → 31/01/19

Access to Document

10.1109/MEMSYS.2019.8870820

Cite this

Ji, B., Wang, M., Guo, Z., Hong, W., Wang, L., Wang, X., Yang, B., Wang, W., & Liu, J. (2019). Wrinkled Microelectrode Interface Based on Oil-Pretreated Hyperelastic Substrate. In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019 (pp. 561-564). Article 8870820 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2019-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2019.8870820

Ji, Bowen ; Wang, Minghao ; Guo, Zhejun et al. / Wrinkled Microelectrode Interface Based on Oil-Pretreated Hyperelastic Substrate. 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. Institute of Electrical and Electronics Engineers Inc., 2019. pp. 561-564 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{8ab05cb65c504731a565718f388597e5,

title = "Wrinkled Microelectrode Interface Based on Oil-Pretreated Hyperelastic Substrate",

abstract = "This paper reports a unique fabrication method to obtain wrinkled microelectrodes with different surface morphologies based on different hyperelastic substrates for the first time. The wrinkle microstructures are enhanced by mixture silicone oil in the uncured poly (dimethyl siloxane) (PDMS) or Ecoflex polymer followed by oil-extraction in chloroform and depositing 5\ \mu \mathrm{m} Parylene-C film. The wrinkle amplitude of the oil-pretreated PDMS and Ecoflex with Parylene-C top layer show 5-fold and 125-fold increase than the unpretreated ones, respectively. Besides, the wrinkled 3D microelectrode surface distinctly exhibits greater electrochemical properties than the flat 2D one, with impedance decreases of 29.2% and 38.9% for the oil-pretreated PDMS and Ecoflex elastomer.",

author = "Bowen Ji and Minghao Wang and Zhejun Guo and Wen Hong and Longchun Wang and Xiaolin Wang and Bin Yang and Wei Wang and Jingquan Liu",

note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 ; Conference date: 27-01-2019 Through 31-01-2019",

year = "2019",

month = jan,

doi = "10.1109/MEMSYS.2019.8870820",

language = "英语",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "561--564",

booktitle = "2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019",

}

Ji, B, Wang, M, Guo, Z, Hong, W, Wang, L, Wang, X, Yang, B, Wang, W & Liu, J 2019, Wrinkled Microelectrode Interface Based on Oil-Pretreated Hyperelastic Substrate. in 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019., 8870820, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2019-January, Institute of Electrical and Electronics Engineers Inc., pp. 561-564, 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019, Seoul, Korea, Republic of, 27/01/19. https://doi.org/10.1109/MEMSYS.2019.8870820

Wrinkled Microelectrode Interface Based on Oil-Pretreated Hyperelastic Substrate. / Ji, Bowen; Wang, Minghao; Guo, Zhejun et al.
2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. Institute of Electrical and Electronics Engineers Inc., 2019. p. 561-564 8870820 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2019-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Wrinkled Microelectrode Interface Based on Oil-Pretreated Hyperelastic Substrate

AU - Ji, Bowen

AU - Wang, Minghao

AU - Guo, Zhejun

AU - Hong, Wen

AU - Wang, Longchun

AU - Wang, Xiaolin

AU - Yang, Bin

AU - Wang, Wei

AU - Liu, Jingquan

PY - 2019/1

Y1 - 2019/1

N2 - This paper reports a unique fabrication method to obtain wrinkled microelectrodes with different surface morphologies based on different hyperelastic substrates for the first time. The wrinkle microstructures are enhanced by mixture silicone oil in the uncured poly (dimethyl siloxane) (PDMS) or Ecoflex polymer followed by oil-extraction in chloroform and depositing 5\ \mu \mathrm{m} Parylene-C film. The wrinkle amplitude of the oil-pretreated PDMS and Ecoflex with Parylene-C top layer show 5-fold and 125-fold increase than the unpretreated ones, respectively. Besides, the wrinkled 3D microelectrode surface distinctly exhibits greater electrochemical properties than the flat 2D one, with impedance decreases of 29.2% and 38.9% for the oil-pretreated PDMS and Ecoflex elastomer.

AB - This paper reports a unique fabrication method to obtain wrinkled microelectrodes with different surface morphologies based on different hyperelastic substrates for the first time. The wrinkle microstructures are enhanced by mixture silicone oil in the uncured poly (dimethyl siloxane) (PDMS) or Ecoflex polymer followed by oil-extraction in chloroform and depositing 5\ \mu \mathrm{m} Parylene-C film. The wrinkle amplitude of the oil-pretreated PDMS and Ecoflex with Parylene-C top layer show 5-fold and 125-fold increase than the unpretreated ones, respectively. Besides, the wrinkled 3D microelectrode surface distinctly exhibits greater electrochemical properties than the flat 2D one, with impedance decreases of 29.2% and 38.9% for the oil-pretreated PDMS and Ecoflex elastomer.

UR - http://www.scopus.com/inward/record.url?scp=85074340339&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2019.8870820

DO - 10.1109/MEMSYS.2019.8870820

M3 - 会议稿件

AN - SCOPUS:85074340339

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 561

EP - 564

BT - 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019

Y2 - 27 January 2019 through 31 January 2019

ER -

Ji B, Wang M, Guo Z, Hong W, Wang L, Wang X et al. Wrinkled Microelectrode Interface Based on Oil-Pretreated Hyperelastic Substrate. In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. Institute of Electrical and Electronics Engineers Inc. 2019. p. 561-564. 8870820. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2019.8870820

Wrinkled Microelectrode Interface Based on Oil-Pretreated Hyperelastic Substrate

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