Photoelectric neural interface combining wire-bonding μleds with iridium oxide microelectrodes for optogenetics

Bo Wen Ji, Xiao Yang Kang, Ming Hao Wang, Bu Feng Bao, Hong Chang Tian, Bin Yang, Xiang Chen, Xiao Lin Wang, Jing Quan Liu

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

11 Scopus citations

Abstract

This paper reports the design, fabrication, electrical and thermal characterization, as well as attachment and stability of a flexible photoelectric neural interface (PENI). Upon the wire-bonding technology, three micro LED (μLED) chips are well-connected to the polyimide substrate as an array, with their luminous surfaces over against the holes. Meanwhile, a Parylene-C-based array with four microelectrodes (200 μm in diameter) modified by sputtering iridium oxide film is fabricated to record micro electrocorticography (μECoG) signals. Then, the back-to-back assembly is utilized to allow blue light through the aligned holes on both arrays with almost no attenuation. As an optogenetics tool, the PENI can be attached on the cortical surface of a mouse expressing ChR2 to realize synchronized light modulating and neural signal recording.

Original languageEnglish
Title of host publication2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages538-541
Number of pages4
ISBN (Electronic)9781509050789
DOIs
StatePublished - 23 Feb 2017
Externally publishedYes
Event30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States
Duration: 22 Jan 201726 Jan 2017

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
Country/TerritoryUnited States
CityLas Vegas
Period22/01/1726/01/17

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