On the characteristics of Si micro-fabrication by direct etching of excimer laser

Weizheng Yuan; Binghe Ma; Xiaoying Li; Tiejun Li; Lige Wang; Jingru Liu

doi:10.3901/jme.2000.03.107

On the characteristics of Si micro-fabrication by direct etching of excimer laser

Weizheng Yuan, Binghe Ma, Xiaoying Li, Tiejun Li, Lige Wang, Jingru Liu

Research output: Contribution to journal › Article › peer-review

Abstract

The characteristics of Si micro-fabrication for MEMS by direct etching of KrF excimer laser, such as the machined topography, heat situation and thermal affecting zone are studied based on experiment. The duality empirical formula which can reflect the relationship between etching depth and number of pulses, laser energy is obtained and then analyzed.

Original language	English
Pages (from-to)	107-110
Number of pages	4
Journal	Jixie Gongcheng Xuebao/Journal of Mechanical Engineering
Volume	36
Issue number	3
DOIs	https://doi.org/10.3901/jme.2000.03.107
State	Published - 2000

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title = "On the characteristics of Si micro-fabrication by direct etching of excimer laser",

abstract = "The characteristics of Si micro-fabrication for MEMS by direct etching of KrF excimer laser, such as the machined topography, heat situation and thermal affecting zone are studied based on experiment. The duality empirical formula which can reflect the relationship between etching depth and number of pulses, laser energy is obtained and then analyzed.",

author = "Weizheng Yuan and Binghe Ma and Xiaoying Li and Tiejun Li and Lige Wang and Jingru Liu",

year = "2000",

doi = "10.3901/jme.2000.03.107",

language = "英语",

volume = "36",

pages = "107--110",

journal = "Jixie Gongcheng Xuebao/Journal of Mechanical Engineering",

issn = "0577-6686",

publisher = "Editorial Office of Chinese Journal of Mechanical Engineering",

number = "3",

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T1 - On the characteristics of Si micro-fabrication by direct etching of excimer laser

AU - Yuan, Weizheng

AU - Ma, Binghe

AU - Li, Xiaoying

AU - Li, Tiejun

AU - Wang, Lige

AU - Liu, Jingru

PY - 2000

Y1 - 2000

N2 - The characteristics of Si micro-fabrication for MEMS by direct etching of KrF excimer laser, such as the machined topography, heat situation and thermal affecting zone are studied based on experiment. The duality empirical formula which can reflect the relationship between etching depth and number of pulses, laser energy is obtained and then analyzed.

AB - The characteristics of Si micro-fabrication for MEMS by direct etching of KrF excimer laser, such as the machined topography, heat situation and thermal affecting zone are studied based on experiment. The duality empirical formula which can reflect the relationship between etching depth and number of pulses, laser energy is obtained and then analyzed.

UR - http://www.scopus.com/inward/record.url?scp=0033903842&partnerID=8YFLogxK

U2 - 10.3901/jme.2000.03.107

DO - 10.3901/jme.2000.03.107

M3 - 文章

AN - SCOPUS:0033903842

SN - 0577-6686

VL - 36

SP - 107

EP - 110

JO - Jixie Gongcheng Xuebao/Journal of Mechanical Engineering

JF - Jixie Gongcheng Xuebao/Journal of Mechanical Engineering

IS - 3

ER -

On the characteristics of Si micro-fabrication by direct etching of excimer laser

Abstract

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