Through Glass Vias by Wet-etching Process in 49% HF Solution Using an AZ4620 Enhanced Cr/Au Mask

Guanghui Ding, Binghe Ma, Yuchao Yan, Weizheng Yuan, Jinjun Deng, Jian Luo

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

6 引用 （Scopus）

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Material Science