Thermodynamics of the gas-phase reactions in chemical vapor deposition of silicon carbide with methyltrichlorosilane precursor

Juanli Deng, Kehe Su, Xin Wang, Qingfeng Zeng, Laifei Cheng, Yongdong Xu, Litong Zhang

科研成果: 期刊稿件 › 文章 › 同行评审

43 引用 （Scopus）

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Chemistry

Chemical Engineering