Thermodynamics equilibrium analysis on the chemical vapor deposition of HfC as coatings for ceramic matrix composites with HfClx(x = 2–4)-CyHz(CH4, C2H4 and C3H6)-H2-Ar system

Juanli Deng, Baofu Lu, Kaiyue Hu, Bohan Zheng, Shangwu Fan, Laifei Cheng, Litong Zhang

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Engineering

Material Science

Chemical Engineering