Thermodynamic study on co-deposition of ZrB 2-SiC from ZrCl 4-BCl 3-CH 3SiCl 3-H 2-Ar system

Juanli Deng, Laifei Cheng, Guopeng Zheng, Kehe Su, Litong Zhang

科研成果: 期刊稿件 › 文章 › 同行评审

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Chemistry

Engineering

Material Science