Thermodynamic study and preparation of Si-B-N ceramic coating by LPCVD from SiCl4-NH3-BCl3-H2-Ar system

Jianping Li, Laifei Cheng, Fang Ye, Yongsheng Liu, Yan Zhu, Litong Zhang

科研成果: 期刊稿件 › 文章 › 同行评审

2 引用 （Scopus）

指纹

探究 'Thermodynamic study and preparation of Si-B-N ceramic coating by LPCVD from SiCl4-NH3-BCl3-H2-Ar system' 的科研主题。它们共同构成独一无二的指纹。

Material Science

Engineering