Thermodynamic calculations of ZrC-SiC system for chemical vapor deposition applications from SiCl4-ZrCl4-CH4-H2

Qiaomu Liu, Litong Zhang, Yiguang Wang, Laifei Cheng

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

2 引用 （Scopus）

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Chemistry