Tailoring the wettability of patterned silicon surfaces with dual-scale pillars: From hydrophilicity to superhydrophobicity

Yang He, Chengyu Jiang, Hengxu Yin, Weizheng Yuan

科研成果: 期刊稿件文章同行评审

45 引用 (Scopus)

摘要

Wettability tailoring of patterned silicon surface has great potential in fields producing integrated circuits, solar cells, sensors, detectors, and micro/nano electromechanical systems. The present paper presents a convenient yet effective method of combining reactive ion etching and catalyzed etching to prepare silicon surface with micro-nano dual-scale pillars. The experimental results indicate that the hydrophilic surface transformed to a superhydrophobic surface when micro-nano dual-scale pillars were formed. The surface preserved superhydrophobicity even when the geometric parameters of the micropillars were changed. Overhangs of water drops on steep micro-nano dual-scale pillars result in superhydrophobicity. This method offers a new way for tailoring the wettability of patterned silicon surfaces.

源语言英语
页(从-至)7689-7692
页数4
期刊Applied Surface Science
257
17
DOI
出版状态已出版 - 15 6月 2011

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