System-level modeling method based on hybrid macromodels

System-level modeling method based on hybrid macromodels was proposed for rapid modeling and simulation of MEMS devices with complex structures. This method was to combine analytical-method based macromodel and numerical-method based macromodel in a simulator to describe the characteristics of MEMS devices. As a demonstration, the system-level model of a z-axis accelerometer was established using this method and was simulated in SABER. Simulation results show that the modal frequency obtained by the method is agree well with that by finite element analysis (error less than 3%), and that the method is effective for rapidly performing system-level time-domain simulation.