摘要
The Si/C/N nanocomposite powder was synthesized by irradiating a mixture of HMDS (hexamethyldisilazane) and NH3 with a high power CO2 laser. The influences of HMDS flow rate and NH3 on the powder composition were studied. The results show that increasing HMDS flow rate can decrease the carbon content, increase the hydrogen content, and keep the silicon and nitrogen content constant. The addition of NH3 can greatly decrease the carbon content, and increase the nitrogen content.
源语言 | 英语 |
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页(从-至) | 35-39 |
页数 | 5 |
期刊 | Fuhe Cailiao Xuebao/Acta Materiae Compositae Sinica |
卷 | 14 |
期 | 2 |
出版状态 | 已出版 - 5月 1997 |