Simulation and application of spherical tool influence function for magnetorheological finishing

Hong Xiang Wang, Shi Wei Liu, Qing Hua Zhang, Jing Hou, Xian Hua Chen

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

Magnetorheological finishing (MRF) has been widely used in the field of modern optical machining due to the high certainty of processing. In the processing of spherical components, the detection means and sample preparation limit the acquisition of magnetorheological spherical tool influence function. In order to realize the high precision manufacturing of spherical components, the spherical removal function in the magneto-rheological polishing process is simulated and applied in practice. Based on the Preston equation, the material removal of the planar component was analyzed and the plane tool influence function model was established. On this basis, the correlation between spherical removal and plane removal was analyzed, and a simplified spherical tool influence function simulation method was proposed, and its accuracy was verified by experiments. Aiming at the processing of spherical components, the processing technology was improved and the actual processing was carried out. After processing, the PV value of the transmitted wavefront was 0.09λ, and the RMS value was 3.2 nm. The experimental results show that the spherical tool influence function simulated in this paper can be applied in actual processing and obtain a high-quality optical surface.

源语言英语
主期刊名10th International Symposium on Advanced Optical Manufacturing and Testing Technologies
主期刊副标题Advanced Optical Manufacturing and Metrology Technologies
编辑Mingbo Pu, John H. Marsh, Bin Fan, Yifan Dai, Xiong Li, Xiangang Luo
出版商SPIE
ISBN(电子版)9781510650176
DOI
出版状态已出版 - 2021
已对外发布
活动10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing and Metrology Technologies 2021 - Chengdu, 中国
期限: 14 6月 202117 6月 2021

出版系列

姓名Proceedings of SPIE - The International Society for Optical Engineering
12071
ISSN(印刷版)0277-786X
ISSN(电子版)1996-756X

会议

会议10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing and Metrology Technologies 2021
国家/地区中国
Chengdu
时期14/06/2117/06/21

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