Sandwich-structured two-dimensional MEMS electret power generator for low-level ambient vibrational energy harvesting

Engineering

• Capacitive 66%
• Damping Force 33%
• Electret 100%
• Electricity Generation 100%
• Electrostatic Force 33%
• Energy Harvesting 100%
• Flexure 33%
• Mass System 33%
• Microelectromechanical System 100%
• Output Power 33%
• Parallel Beam 33%
• Plane Direction 33%
• Power Density 33%
• Resonator 33%
• Sandwich Structures 33%
• Scavenge 33%
• Scavenging 33%
• Two Dimensional 100%
• Vibration Mode 33%