Role of Invisible Oxygen in the Trilayer Laminates of Ultrathin a-IGZO/SiOx/a-IGZO Films

Aitkazy Kaisha, Olzat Toktarbaiuly, Ardak Ainabayev, Tolagay Duisebayev, Hongqiang Wang, Nurxat Nuraje, Igor V. Shvets

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