Removal function of computerized numerical controlled chemical polishing based on the Marangoni interface effect

Based on the Marangoni interface effect, the theory and test of the removal function of numerically controlled chemical polishing are studied. Wet etching of optics surface is adopted in large optical components manufacture. Before the optical components test, the roughness of the optical components, measured by WKYO apparatus, is 0.72 nm; after the test, the roughness is 0.71 nm. Based on the Preston supposition, the theory and the removal function of numerically controlled chemical polishing are setup. The removal function curve of small tool polishing is Gauss-like.