PZT film and Si substrate two-layer system patterning morphology by femtosecond pulsed laser

Shizhou Xiao, Rui Guo, Guanghua Cheng, Yalei Wu, Wenhao Huang, Jiaru Chu

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

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