Preparation of Fine Grained SiC Layer by Fluidized Bed Chemical Vapor Deposition with Pulsed Propylene

Rongzheng Liu, Malin Liu, Ziliang Wang, Youlin Shao, Jiaxing Chang, Bing Liu, Yongxin Wang, T. Bessman

科研成果: 期刊稿件 › 文章 › 同行评审

16 引用 （Scopus）

指纹

探究 'Preparation of Fine Grained SiC Layer by Fluidized Bed Chemical Vapor Deposition with Pulsed Propylene' 的科研主题。它们共同构成独一无二的指纹。

Chemical Engineering

Material Science

Engineering