@article{6369211e84214c2c9a7ccc7221035b42,
title = "Patterning single-layer materials by electrical breakdown using atomic force microscopy",
abstract = "ARTICLE HIGHLIGHTS HIGHLIGHTS • Successful patterning of 2D materials by electrical breakdown. • A maskless, pollution-free method for patterning various 2D materials. • Nanopattern size is characterized by number of voltage scanning cycles.",
keywords = "2D material, AFM, Electrical breakdown, Lithography, Nanopattern",
author = "Yajie Yang and Jiajia Lu and Yanbo Xie and Libing Duan",
note = "Publisher Copyright: {\textcopyright} 2024 2023 Author(s).",
year = "2024",
month = mar,
day = "1",
doi = "10.1063/10.0023848",
language = "英语",
volume = "7",
journal = "Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering",
issn = "1672-6030",
publisher = "American Institute of Physics",
number = "1",
}