On the Sensitivity of Mode-Localized Accelerometers Operating in the Nonlinear Duffing Regime

Hemin Zhang, Milind Pandit, Guillermo Sobreviela, Madan Parajuli, Dongyang Chen, Jiangkun Sun, Chun Zhao, Ashwin Seshia

科研成果: 书/报告/会议事项章节会议稿件同行评审

8 引用 (Scopus)

摘要

Mode-localized sensors have attracted great attention due to the high parametric sensitivity and common mode rejection to temperature drift. The reported results from such sensors has largely relied on operation in the linear regime. However, operation at specific bifurcation points in the nonlinear regime can enable improvements in relevant performance metrics. This paper theoretically and experimentally reveals the operation of mode-localized sensors with respect to applied stiffness perturbations while operating in the nonlinear Duffing regime. The operation of a mode-localized accelerometer is optimized with benefit of the insights gained from theoretical analysis with operation at the top bifurcation point in the nonlinear regime. A prototype accelerometer device demonstrates a noise floor of 85 ng/√Hz and a bias instability of 130 ng, establishing a new benchmark for sensors employing vibration mode localization as a sensing paradigm.

源语言英语
主期刊名34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
出版商Institute of Electrical and Electronics Engineers Inc.
830-833
页数4
ISBN(电子版)9781665419123
DOI
出版状态已出版 - 25 1月 2021
已对外发布
活动34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 - Virtual, Gainesville, 美国
期限: 25 1月 202129 1月 2021

出版系列

姓名Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2021-January
ISSN(印刷版)1084-6999

会议

会议34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
国家/地区美国
Virtual, Gainesville
时期25/01/2129/01/21

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