TY - GEN
T1 - On the Sensitivity of Mode-Localized Accelerometers Operating in the Nonlinear Duffing Regime
AU - Zhang, Hemin
AU - Pandit, Milind
AU - Sobreviela, Guillermo
AU - Parajuli, Madan
AU - Chen, Dongyang
AU - Sun, Jiangkun
AU - Zhao, Chun
AU - Seshia, Ashwin
N1 - Publisher Copyright:
© 2021 IEEE.
PY - 2021/1/25
Y1 - 2021/1/25
N2 - Mode-localized sensors have attracted great attention due to the high parametric sensitivity and common mode rejection to temperature drift. The reported results from such sensors has largely relied on operation in the linear regime. However, operation at specific bifurcation points in the nonlinear regime can enable improvements in relevant performance metrics. This paper theoretically and experimentally reveals the operation of mode-localized sensors with respect to applied stiffness perturbations while operating in the nonlinear Duffing regime. The operation of a mode-localized accelerometer is optimized with benefit of the insights gained from theoretical analysis with operation at the top bifurcation point in the nonlinear regime. A prototype accelerometer device demonstrates a noise floor of 85 ng/√Hz and a bias instability of 130 ng, establishing a new benchmark for sensors employing vibration mode localization as a sensing paradigm.
AB - Mode-localized sensors have attracted great attention due to the high parametric sensitivity and common mode rejection to temperature drift. The reported results from such sensors has largely relied on operation in the linear regime. However, operation at specific bifurcation points in the nonlinear regime can enable improvements in relevant performance metrics. This paper theoretically and experimentally reveals the operation of mode-localized sensors with respect to applied stiffness perturbations while operating in the nonlinear Duffing regime. The operation of a mode-localized accelerometer is optimized with benefit of the insights gained from theoretical analysis with operation at the top bifurcation point in the nonlinear regime. A prototype accelerometer device demonstrates a noise floor of 85 ng/√Hz and a bias instability of 130 ng, establishing a new benchmark for sensors employing vibration mode localization as a sensing paradigm.
KW - Accelerometer
KW - Nonlinear effects
KW - Vibration Mode Localization
KW - Weakly Coupled Resonators
UR - http://www.scopus.com/inward/record.url?scp=85103454824&partnerID=8YFLogxK
U2 - 10.1109/MEMS51782.2021.9375204
DO - 10.1109/MEMS51782.2021.9375204
M3 - 会议稿件
AN - SCOPUS:85103454824
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 830
EP - 833
BT - 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
Y2 - 25 January 2021 through 29 January 2021
ER -