Micromechanism of oxygen transport during initial stage oxidation in Si(100) surface: A ReaxFF molecular dynamics simulation study

Yu Sun, Yilun Liu, Xuefeng Chen, Zhi Zhai, Fei Xu, Yijun Liu

科研成果: 期刊稿件 › 文章 › 同行评审

30 引用 （Scopus）

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Physics

Material Science

Chemical Engineering

Engineering