TY - JOUR
T1 - Micromachining of an in-fiber extrinsic fabry-perot interfereometric (MEFPI) sensor by using a femtosecond laser
AU - Rao, Yun Jiang
AU - Deng, Ming
AU - Zhu, Tao
AU - Tang, Qing Tao
AU - Cheng, Guang Hua
PY - 2008
Y1 - 2008
N2 - This paper reports a novel micro extrinsic fiber-optic F-P interferometric (MEFPI) sensor micromachined on a conventional optical fiber (Corning SMF-28) by using a near-infrared femtosecond laser, for the first time to the best of our knowledge. The strain and temperature characteristics of such a sensor were investigated and the experimental results show that the strain and temperature sensitivities are 0.006nm/με and -0.0017nm/°C, respectively. This type of MEFPI sensors has a number of advantages when compared with conventional EFPI sensors, such as easy fabrication, high integration degree, good reliability, low temperature cross-sensitivity, low cost, and capability for mass-production, offering great potential for a wide range of sensing applications.
AB - This paper reports a novel micro extrinsic fiber-optic F-P interferometric (MEFPI) sensor micromachined on a conventional optical fiber (Corning SMF-28) by using a near-infrared femtosecond laser, for the first time to the best of our knowledge. The strain and temperature characteristics of such a sensor were investigated and the experimental results show that the strain and temperature sensitivities are 0.006nm/με and -0.0017nm/°C, respectively. This type of MEFPI sensors has a number of advantages when compared with conventional EFPI sensors, such as easy fabrication, high integration degree, good reliability, low temperature cross-sensitivity, low cost, and capability for mass-production, offering great potential for a wide range of sensing applications.
KW - Femtosecond lasers
KW - Fiber-optic extrinsic Fabry-Perot interferometric (EFPI) sensor
KW - Laser-micromachining
KW - Optical fiber sensors
UR - http://www.scopus.com/inward/record.url?scp=38849199156&partnerID=8YFLogxK
M3 - 文章
AN - SCOPUS:38849199156
SN - 1013-9826
VL - 364-366 II
SP - 1203
EP - 1206
JO - Key Engineering Materials
JF - Key Engineering Materials
ER -