MEMS macromodeling based on krylov subspace projection method

Based on Krylov subspace projection method and finite element analysis, we had obtained an approach to construct device macromodel. These reduced-order macromodels could be obtained by extracting data from the fully 2D or 3D meshed model runs. The macromodels generated by this method have the characteristics of low computational expense, acceptable precision, easily inserted into a system lever simulator for simulation. As an example, the method was demonstrated by capturing the behavior of a comb resonator, furthermore, the resonator macromodel's characteristics were verified with the full finite element model.